Electrostatic chuck with internal flow adjustments for improved temperature distribution

ABSTRACT

An electrostatic chuck is described with external flow adjustments for improved temperature distribution. In one example, an apparatus has a dielectric puck to electrostatically grip a silicon wafer. A cooling plate is fastened to and thermally coupled to the ceramic puck. A supply plenum receives coolant from an external source and a plurality of coolant chambers are thermally coupled to the cooling plate and receive coolant from the supply plenum. A return plenum is coupled to the cooling zones to exhaust coolant from the cooling zones. A plurality of adjustable orifices are positioned between the supply plenum and a respective one of the cooling zones to control the flow rate of coolant from the supply plenum to the cooling zones.

TECHNICAL FIELD

Embodiments of the present invention relate to the microelectronics manufacturing industry and more particularly to temperature controlled chucks for supporting a workpiece during plasma processing.

BACKGROUND

In the manufacture of semiconductor chips a silicon wafer or other substrate is exposed to a variety of different processes in different processing chambers. The chambers may expose the wafer to plasmas, chemical vapors, metals, laser etching, and various deposition and acid etching processes in order to form circuitry and other structures on the wafer. During these processes, the silicon wafer may be held in place by an electrostatic chuck (ESC). The chuck holds the wafer by generating an electrostatic field to clamp the back side of the wafer to a flat surface or puck surface of the chuck.

As fabrication techniques for plasma processing equipment advance, such as those designed to perform plasma etching of microelectronic devices and the like, the temperature of the wafer during processing becomes more important.

ESCs have been designed for thermal uniformity across the surface of the substrate, sometimes called a workpiece. ESCs use liquid cooling to absorb the plasma power heat and remove it from the chuck. An ESC may also include independently controlled heaters in multiple zones. This allows for a wider process window under different process and plasma conditions. Individual heater zones in the radial direction can create various radial temperature profiles which compensate for other etch process radial non-uniformities. However, radial heaters cannot affect non-uniformities in the azimuthal direction.

In semi-conductor etch processing, the temperature of a wafer during processing influences the rate at which structures on the wafer are etched. Other processes may also have a temperature dependence. This temperature influence is present, for example, in conductor etch applications in which very precise wafer temperature control helps to obtain a uniform etch rate. A more precise thermal performance allows for more precisely formed structures on the wafer. Uniform etch rates across the wafer allow smaller structures to be formed on the wafer. Thermal performance or temperature control is therefore a factor in reducing the size of transistors and other structures on a silicon chip.

SUMMARY

An electrostatic chuck is described with internal flow adjustments for improved temperature distribution. In one example, an apparatus has a dielectric puck to electrostatically grip a silicon wafer. A cooling plate is fastened to and thermally coupled to the ceramic puck. A supply plenum receives coolant from an external source and a plurality of coolant chambers are thermally coupled to the cooling plate and receive coolant from the supply plenum. A return plenum is coupled to the cooling zones to exhaust coolant from the cooling zones. A plurality of adjustable orifices are positioned between the supply plenum and a respective one of the cooling zones to control the flow rate of coolant from the supply plenum to the cooling zones.

BRIEF DESCRIPTION OF THE DRAWINGS

Embodiments of the present invention are illustrated by way of example, and not limitation, in the figures of the accompanying drawings in which:

FIG. 1 is a schematic of a plasma etch system including a chuck assembly in accordance with an embodiment of the present invention;

FIG. 2 is a simplified cross-sectional diagram of a portion of an electrostatic chuck in accordance with an embodiment of the invention;

FIG. 3 is a simplified cross-sectional diagram of a model of ESC temperature and thermal conduction for an electrostatic chuck in accordance with an embodiment of the invention;

FIG. 4 is a diagram of a top elevation contour line graph of the temperature of a wafer in a processing chamber;

FIG. 5 is an isometric view of an electrostatic chuck in accordance with an embodiment of the invention;

FIG. 6 is an isometric view of the electrostatic chuck of FIG. 5 with the puck removed in accordance with an embodiment of the invention;

FIG. 7 is an isometric view of an electrostatic chuck cut in half accordance with an embodiment of the invention;

FIG. 8 is a cross-sectional view of a feedthru channel of an electrostatic chuck in accordance with an embodiment of the invention;

FIG. 9 is a cross-sectional cutaway view of a ceramic puck and a cooling plate in accordance with an embodiment of the invention;

FIG. 10 is a cross-sectional cutaway view of a ceramic puck and cooling plate showing connection screws in accordance with an embodiment of the invention;

FIG. 11 is a cross-sectional cutaway view of a valve of an electrostatic chuck with arrows to indicate coolant flow in accordance with an embodiment of the invention;

FIG. 12 is a top isometric view of the middle plate of a coolant plate of an electrostatic chuck in accordance with an embodiment of the invention;

FIG. 13 is a cross-sectional isometric view of an alternative electrostatic chuck in accordance with an embodiment of the invention;

FIG. 14A is a top isometric view of a mid plate over a bottom plate of an electrostatic chuck in accordance with an embodiment of the invention;

FIG. 14B is a top isometric view of a bottom plate of an electrostatic chuck in accordance with an embodiment of the invention;

FIG. 15A is a bottom isometric view of a bottom plate of an electrostatic chuck in accordance with an embodiment of the invention;

FIG. 15B is a bottom isometric view of a cooling plate with the bottom plate of an electrostatic chuck removed in accordance with an embodiment of the invention;

FIG. 15C is a bottom isometric view of a top plate of an electrostatic chuck in accordance with an embodiment of the invention;

FIG. 16 is a cross-sectional side view of a cooling plate of an electrostatic chuck in accordance with an embodiment of the invention;

FIG. 17 is a cross-sectional side view of a cooling plate of an electrostatic chuck with a plastic insert attached proximate an orifice of the cooling plate in accordance with an embodiment of the invention;

FIG. 18 is a diagram of calibrating the orifice flow rates for a cooling plate of an electrostatic chuck in accordance with an embodiment of the invention; and

FIG. 19 is a process flow diagram of adjusting flow rates in an electrostatic chuck in accordance with an embodiment of the invention.

DETAILED DESCRIPTION

In the following description, numerous details are set forth, however, it will be apparent to one skilled in the art, that the present invention may be practiced without these specific details. In some instances, well-known methods and devices are shown in block diagram form, rather than in detail, to avoid obscuring the present invention. Reference throughout this specification to “an embodiment” or “one embodiment” means that a particular feature, structure, function, or characteristic described in connection with the embodiment is included in at least one embodiment of the invention. Thus, the appearances of the phrase “in an embodiment” or “in one embodiment” in various places throughout this specification are not necessarily referring to the same embodiment of the invention. Furthermore, the particular features, structures, functions, or characteristics may be combined in any suitable manner in one or more embodiments. For example, a first embodiment may be combined with a second embodiment anywhere the particular features, structures, functions, or characteristics associated with the two embodiments are not mutually exclusive.

As used in the description of the invention and the appended claims, the singular forms “a”, “an” and “the” are intended to include the plural forms as well, unless the context clearly indicates otherwise. It will also be understood that the term “and/or” as used herein refers to and encompasses any and all possible combinations of one or more of the associated listed items.

The terms “coupled” and “connected,” along with their derivatives, may be used herein to describe functional or structural relationships between components. It should be understood that these terms are not intended as synonyms for each other. Rather, in particular embodiments, “connected” may be used to indicate that two or more elements are in direct physical, optical, or electrical contact with each other. “Coupled” my be used to indicate that two or more elements are in either direct or indirect (with other intervening elements between them) physical, optical, or electrical contact with each other, and/or that the two or more elements co-operate or interact with each other (e.g., as in a cause an effect relationship).

The terms “over,” “under,” “between,” and “on” as used herein refer to a relative position of one component or material layer with respect to other components or layers where such physical relationships are noteworthy. For example in the context of material layers, one layer disposed over or under another layer may be directly in contact with the other layer or may have one or more intervening layers. Moreover, one layer disposed between two layers may be directly in contact with the two layers or may have one or more intervening layers. In contrast, a first layer “on” a second layer is in direct contact with that second layer. Similar distinctions are to be made in the context of component assemblies.

The temperature uniformity across the surface of an ESC has been improved with improved cooling plate and heater designs and improvements in bonding the cooling plate to the puck that holds the workpiece. However, these designs and processes are still subject to manufacturing variations, which can lead to significant thermal non-uniformity. For some implementations, a spatial temperature variation of less than +/−0.3° C. across the wafer is desired.

The temperature of the ESC can be more precisely controlled by using a plurality of small heaters, but this requires complex wiring and control systems, at significant cost. In embodiments described herein, a plasma processing chuck includes a plurality of orifices that can be independently drilled, expanded, exchanged to different sizes. The orifices control the flow of coolant to different areas of the cooling base. The thermal performance of the chuck can be improved through the adjustment of many small flow restrictors in the cooling plate. The local values of R, the thermal resistance of the cooling plate, can also be changed for the cooling plate. This possibility has not existed in previous ESC designs. As described herein, this new cooling plate is simple and can be calibrated, manufactured and used at low cost. The adjustable orifices can be used to correct manufacturing variations, to compensate for chamber and process inconsistencies, and to vary the temperature for different areas of the workpiece.

FIG. 1 is a schematic of a plasma etch system 100 including a chuck assembly 142 in accordance with an embodiment of the present invention. The plasma etch system 100 may be any type of high performance etch chamber known in the art, such as, but not limited to, Enabler™, DPS II, AdvantEdge™ G3, E-MAX®, Axiom, Orion, or Mesa CIP chambers, all of which are manufactured by Applied Materials of California, USA. Other commercially available etch chambers may similarly utilize the chuck assemblies described herein. While the exemplary embodiments are described in the context of the plasma etch system 100, the chuck assembly described herein is also adaptable to other processing systems used to perform any plasma fabrication process (e.g., plasma deposition systems, etc.)

Referring to FIG. 1, the plasma etch system 100 includes a grounded chamber 105. Process gases are supplied from gas source(s) 129 connected to the chamber through a mass flow controller 149 to the interior of the chamber 105. Chamber 105 is evacuated via an exhaust valve 151 connected to a high capacity vacuum pump stack 155. When plasma power is applied to the chamber 105, a plasma is formed in a processing region over a workpiece 110. A plasma bias power 125 is coupled into a chuck assembly 142 to energize the plasma. The plasma bias power 125 typically has a low frequency between about 2 MHz to 60 MHz, and may be, for example, in the 13.56 MHz band. In an example embodiment, the plasma etch system 100 includes a second plasma bias power 126 operating at about the 2 MHz band which is connected to an RF match 127. The plasma bias power 125 is also coupled to the RF match and also coupled to a lower electrode [not shown] via a power conduit 128. A plasma source power 130 is coupled through another match (not shown) to a plasma generating element 135 to provide high frequency source power to inductively or capacitively energize the plasma. The plasma source power 130 may have a higher frequency than the plasma bias power 125, such as between 100 and 180 MHz, and may, for example, be in the 162 MHz band.

A workpiece 110 is loaded through an opening 115 and clamped to a chuck assembly 142 inside the chamber. The workpiece 110, such as a semiconductor wafer, may be any wafer, substrate, or other material employed in the semi-conductor processing art and the present invention is not limited in this respect. The workpiece 110 is disposed on a top surface of a dielectric layer 143 or puck of the chuck assembly that is disposed over a cooling base assembly 144 of the chuck assembly. A clamp electrode (not shown) is embedded in the dielectric layer 143. In particular embodiments, the chuck assembly 142 may include different heater zones, such as a center zone 141 and edge zones 199, each zone 141, 199 may be independently controllable to the same or to different temperature set points.

A system controller 170 is coupled to a variety of different systems to control a fabrication process in the chamber. The controller 170 may include a temperature controller 175 to execute temperature control algorithms (e.g., temperature feedback control) and may be either software or hardware or a combination of both software and hardware. The system controller 170 also includes a central processing unit 172, memory 173 and input/output interface 174. The temperature controller 175 is to output control signals affecting the rate of heat transfer between the chuck assembly 142 and a heat source and/or heat sink external to the plasma chamber 105 for the various heater zones 141, 199.

In embodiments, in addition to the different heaters, there may be different coolant temperature zones. The coolant zones may include separate, independently controlled heat transfer fluid loops with separate flow control that is controlled based on a zone-specific temperature feedback loop. In the example embodiment, the temperature controller 175 is coupled to a first heat exchanger (HTX)/chiller 177 and may further be coupled to a second HTX/chiller 178 and a third HTX/chiller 179. The flow rate of the heat transfer fluid or coolant through conduits in the chuck assembly 142 may also be controlled by the heat exchangers.

One or more valves 181, 185, 186 (or other flow control devices) between the heat exchanger/chillers 177, 178, 179 and fluid conduits in the chuck assembly 142 may be controlled by the temperature controller 175 to independently control a rate of flow of the heat transfer fluid to each of the different cooling zones. The heat transfer fluid may be a liquid, such as, but not limited to deionized water/ethylene glycol, a fluorinated coolant such as Fluorinert® from 3M or Galden® from Solvay Solexis, Inc or any other suitable dielectric fluids such as those containing perfluorinated inert polyethers. While the present description describes the ESC in the context of a plasma processing chamber, the ESC described herein may be used in a variety of different chambers and for a variety of different processes.

FIG. 2 is a simplified cross-sectional diagram of a portion of an electrostatic chuck (ESC) 200. There are at least four components for regulating the temperature of the chuck surface and therefore the temperature of a wafer (not shown) on the chuck. A cooling plate 201, typically made from a thermally conducting metal serves as a heat sink. The cooling plate is bonded to a dielectric puck 202 with a high temperature adhesive 204, such as silicone. The puck is typically ceramic but may alternatively be made with other materials. Electrodes (not shown) are embedded within the puck to generate an electrostatic field with which to grip a workpiece, such as a silicon substrate. Resistive heater traces 203 are also embedded within the puck for temperature control.

The cooling plate 201 also includes channels 205 for coolant. Coolant is pumped through the channels to absorb heat from the cooling plate and pumped to a heat exchanger to cool the fluid which is then recirculated back to the cooling plate. The cooling plate absorbs heat from the embedded heaters and the workpiece through the ceramic plate. The temperature uniformity depends on the quality of the ceramic puck 202, the elastomer bond 204, and the cooling plate channels 205. It also depends on how well heat is transferred from the workpiece to the ceramic puck. All of these factors are subject to variations in manufacture and use.

FIG. 3 is a simplified one-dimensional diagram of a model of ESC temperature and thermal conduction. The diagram is presented using the same components and reference numbers as in FIG. 2, however, only a portion of the FIG. 2 diagram is shown for reference. In this model, the ceramic temperature, Tceramic, at a given location 220 is determined in part by the “thermal resistances” of the cooling plate (R cooling plate) 222 and the bond (R bond) 221. Heat is provided by the heater power (Q heater) 223 and removed by the cooling plate (T cooling plate 224) and by the coolant (T coolant 226). The thermal resistance is presented for purposes of explanation. The components of FIG. 3 may be described as follows:

Q heater 223: The heater power at a given point on the ESC surface is determined by the number of heater traces in the area, and the electrical resistance of those heater traces. When the chuck is in use, heat is also applied by the plasma. For testing purposes, the heaters may be used to simulate plasma processing or any other high temperature processing or a different external or internal heat source may be used. If the heater traces produce sufficient heating, then the heater traces may be used. Rather than generating temperatures similar to those used for plasma processing, the heater traces may be used simply to generate a measureable heat flow from the ceramic puck 202 to the other components.

R bond 221: The resistance of the bond is determined by the thermal conductivity of the bond material, the bond thickness, and the quality of the bond connection both to the cooling plate and to the ceramic puck.

T cooling plate 224: The temperature of the cooling plate is largely controlled by the conduction of heat from the ceramic puck through the bond and into the coolant. The flow of heat into the coolant at any one location 224 of the cooling plate is affected by at least two factors: 1) the coolant temperature increases as it travels through the cooling plate so that the coolant at different locations of the cooling plate will be at different temperatures and 2) feedthrus and other features of the cooling plate constrain where the cooling channels can be placed in the cooling plate so that some locations have more coolant flow then others.

R cooling plate 222: The thermal resistance of the cooling plate is a combined function of the local fluid heat transfer coefficient, the geometry of the cooling plate, and the thermal conductivity of the cooling plate.

T coolant 226: The temperature of the coolant entering the cooling plate may be carefully controlled by a heat exchanger or chiller. However, as the coolant travels through the cooling plate, its temperature increases. In a typical application, the coolant temperature may rise by up to 10° C. So the local coolant temperature at a given point on the ESC varies greatly.

T ceramic: The temperature of the ESC ceramic at any one particular location 220 may be estimated using the relationship: T ceramic=Q heater R bond+Q heater R cooling plate+T coolant.

This shows that to achieve a uniform temperature across the ceramic puck, R cooling plate may be adjusted at each location to compensate for variation of R bond, Q heater, and T coolant. Alternatively, another way to achieve the most uniform ceramic temperature possible is to design the heater traces (and hence Q heater) to compensate for the spatial variations of the cooling plate temperature. In other words Q heater is adjusted based on variations in R cooling plate and T coolant.

In an ideal ESC design, the heater watt density will be matched to perfectly compensate for variations in the cooling plate temperature. The bond thickness is uniform. As a result, the ceramic temperature is uniform in every dimension. In any real manufactured ESC, the ceramic temperature is non-uniform due to several factors. First, the design of the heater traces may not be perfect. As a result an ideally uniform watt density is difficult to achieve. Second, the heater traces are manufactured or created using a screen printing process. Printing error causes the actual watt density to deviate still further from the imperfect values that were designed for the traces. Third, the bond thickness of the adhesive varies. As a result, a typical manufactured ESC does not have perfectly uniform bond heat resistance.

FIG. 4 is a diagram of a top elevation graph 400 of the temperature of a wafer 404 on an ESC. This graph shows surface temperature as a function of position on the wafer using contour lines 402. Such a diagram may be generated based on a measurement of an actual ESC as it is heated by the conductive traces and cooled by coolant flowing through the channels of the cooling base. Such measurements may be made by heating a wafer and then measuring the temperature at different positions using an infrared camera. As shown, the temperature values shown on the surface temperature contour lines vary in a pattern that is related to manufacturing and design features of the ESC. Contour lines are shown only for integer temperature values in order to simplify the diagram. For an actual measurement, much higher accuracy, for example tenths of a degree may be desired.

In order to even out the temperatures and obtain a more uniform temperature across the ESC, external adjustments can be made to the coolant flow within the ESC. In one example, the cooling plate contains many (e.g. 50+) small flow adjustable orifices. These orifices may be adjusted by mechanically changing their size or by replacing an insert, such as a sleeved tube. Adjustments to the coolant flow through the orifices may be based on a one-time calibration using an infra-red camera. The calibration can compensate for manufacturing defects in the ESC and drastically improve the thermal performance characteristics of the cooling plate. The calibration process may use the measurements to adjust each orifice based on feedback from an infra-red camera. The cooling plate may be measured and the orifices adjusted in an iterative process until the desired heat distribution is obtained.

FIG. 5 is an isometric view of an ESC 500 showing a ceramic puck 502 over a cooling plate 504. The diagram is simplified and does not include electrical, coolant and control connections. The diagram also does not show a variety of different “feedthru” holes in the ceramic puck. These holes are required to accommodate gas outlets, temperature probes, and wafer lift pins.

FIG. 6 is an isometric view of the ESC of FIG. 5 with the ceramic puck removed so that only the cooling plate 504 is visible. The ceramic puck may be attached to the cooling plate in any of a variety of different ways. Typically, the ceramic puck is attached with a bond, such as metallic, nano-foil or silicone adhesive filled with a thermally conductive material, such as alumina, although the invention is not so limited. The cooling plate includes feedthru holes 508 as mentioned above. The periphery of the cooling plate includes mounting holes 507 to attach the ESC to a mounting carriage as shown in FIG. 1.

FIG. 7 is an isometric view of the same ESC 500 cut vertically in half to show a cross section of the internal configuration. The cooling plate 504, in this example is formed of three parts, a top plate 512 to which the ceramic puck is attached, a middle plate 514, and a bottom plate 516. In the illustrated example, the top plate is also attached to the carrier structure through peripheral bolt holes 507 and the top plate surrounds and protects the middle and bottom plates, however, the invention is not so limited. The top plate may be constructed of a durable material able to survive a processing chamber environment, such as ceramic or metal. The bottom plate is subject to less exposure to the chamber and so may be constructed of the same or a less durable material. The middle plate is protected by the top and bottom plates and may be constructed of a different material, such as a plastic.

One of the feedthru holes 508 is visible in this cross-section. It extends through top, middle, and bottom plates so that electrical connectors, gases, or any other desired materials may be connected through the cooling plate. Additional feedthrus (not shown) may extend only partially through the cooling plate for other purposes.

FIG. 8 shows a feedthru in more detail. The feedthru may be provided by a sleeve 518 attached to the top 512 and bottom 516 plates by an adhesive or by welding 520, 522. In the illustrated example, the sleeve is sealed against the middle plate using O-rings 524. This allows a seal to be made against a plastic material for which welding is not possible. The connections may be made in any of a variety of other ways depending on the materials used for the sleeve and the plates, including by brazing or using adhesives, or epoxy, among others. The sleeve protects the electrical or other components (not shown) inside the sleeve. The sleeve also provides additional rigidity to the cooling plate.

FIG. 9 is a cross-sectional cutaway view of the ceramic puck 502 bonded to the cooling plate 504. Electrical connectors and feedthrus are not shown, however, the upper portion 512, middle portion 514 and lower portion 516 are shown. Cooling chambers 530 are defined as spaces between the middle 514 and upper 512 portions. A supply plenum 532 is defined between the middle 514 and bottom 516 portions. The feedthrus (not shown) pass through the cooling chambers and can interfere with the flow of coolant and the design of the coolant chambers.

In this example, the orifices are in channels between the supply plenum and each coolant chamber. The size of each orifice controls the flow of coolant from the supply plenum to its associated coolant chamber. The channels are from the bottom of the middle plate where there is an inlet, through the middle plate to the top of the middle plate where there is an outlet. By changing the size of the orifice, the flow through each individual cooling zone can be changed. The flow can be adjusted independently for each orifice to compensate for different plasma conditions or non-uniformities.

FIG. 10 is a cross-sectional side view as in FIG. 9 showing the bolted construction of the cooling plate. The bottom plate 516 is fastened to the top plate 512 using a series of screws 537. The screws are driven into threaded holes 538 in the top plate. The mid plate 514 is sandwiched between the top and bottom plates. In the illustrated example, the top plate includes an O-ring 540 around its periphery to seal against the bottom plate and keep coolant inside the supply and return plenums. The mid plate also has an O-ring 542 around its periphery to seal the supply plenum against the bottom plate.

The screw-in construction with O-rings allows the cooling plate to easily be disassembled and reassembled. After disassembly, the orifices 536 may easily be accessed for adjustment. The size of the opening of each orifice may be adjusted by machining, drilling, or changing inserts. In addition, some of the orifices may be closed or blocked to prevent coolant flow into certain areas. The cooling plate may then be reassembled and tested for heat distribution or reassembled for use in production. The specific mechanical construction of the cooling plate may be modified to adapt to different implementations.

FIG. 11 shows the flow of coolant fluid from inlet to outlet in a cross-sectional diagram of a portion of the cooling plate. Coolant enters the cooling plate through one or more coolant supply ports 562. The supply ports provide the coolant to one or more supply plenums 532 between the bottom plate 516 and the middle plate 514. The supply plenum is open to one side of the orifices 536 in the lower plate 516. Coolant flows through the orifices 536, through the middle plate 514 into respective cooling chambers 530 between the middle plate 514 and the upper plate 512. From the cooling chambers, the coolant flows to one or more return channels 566 and then to one or more return ports 564. The return ports conduct the coolant to one or more heat exchangers as shown in FIG. 1 to be cooled and recycled back to the supply ports.

FIG. 12 is a top isometric view of the middle plate 514 of the coolant plate showing features that may be cast, stamped, or machined into the middle plate. The middle plate is attached to the bottom plate 516 as shown. The middle plate has hexagonal areas 570 that define the coolant chambers 530 with respect to the top plate (not shown). Each hexagonal area is supplied by the outlet channel 568 from an orifice. The coolant fills the space between the hexagonal area 570 and the top plate, cooling the top plate in the hexagonal area. The coolant then flows into return channels 566 that surround each hexagonal area. The return channels lead to a broader circular channel that surrounds all of the hexagonal areas of the middle plate and follows a path near the periphery of the plate. From the circular channel, the coolant flows into radial channels that lead radially outward away from the circular channel and the hexagonal areas to return outlets 564. The return outlets are on the outer edge of the middle plate as shown but may be placed in a different location, depending on the particular implementation.

The hexagonal areas are each supplied by a different orifice which may be supplying coolant at a different flow rate from other orifices. By feeding the supplied coolant into common channels and a common return plenum as defined by the common channels 566, the fluid pressure through each of the orifices may be equalized. The return ports all contribute equally to drawing the coolant away from the cooling plate.

While hexagonal areas are shown, the invention is not so limited. The hexagonal shape provides for a large capacity and length of shared coolant return channels for the amount of cooling area. The coolant chambers may be arranged in rectangular configurations to provide for straight coolant return channels. This may improve flow. An alternating brick style configuration may be used or any of a variety of polygonal and curved coolant areas may be used, depending on the particular implementation.

The overall cooling operation can be summarized as follows. The parts of the cooling plate define a supply plenum that receives coolant through supply ports and distributes the coolant supply across the coolant plate. The supply plenum in this example is defined between the bottom plate and the mid plate. However, the supply plenum may instead be defined by the mid plate and the top plate.

From the supply plenum, coolant flows through adjustable orifices into cooling zones between the top plate and mid plate. The cooling zones may be in a different location, depending on the particular implementation.

From the cooling zones, flow proceeds into larger spaces between the top plate and the mid plate. These larger spaces form a return plenum. Coolant leaves the ESC from the return plenum through return ports through the mid and bottom plate.

FIG. 13 shows an alternative cooling plate suitable for use with an ESC as described above. The cooling plate 700 is shown with the ceramic puck and other parts removed. This isometric cross-sectional diagram is also simplified and does not show electrical and coolant connections. O-ring grooves and other features are also omitted.

The cooling plate 700 is an assembly of three plates, a top plate 702, a mid plate 704, and a bottom plate 706. As in the example of FIG. 7, the three plates may be joined together with screws, welding, brazing, adhesives or some combination of these approaches and techniques. In this example, a large number of orifices 724 are embedded in the middle cooling plate. By adjusting the size of each orifice, the flow through each individual cooling zone can be adjusted.

As in the example of FIG. 7, a ceramic puck (not shown) is bonded to the cooling plate 700. Electrical connectors allow the ceramic puck to be energized at clamp electrodes to grip a workpiece. A variety of feedthrus 714 provide other connections to the ceramic puck.

The cooling chambers 718 are defined by these two portions and are between these two portions. In this example, the volumes of the cooling chambers formed are in the top plate, rather than in the mid plate. A supply plenum 720 between the mid plate 704 and the bottom plate 706 supplies coolant at the base of the orifices to flow through the orifices.

FIG. 14A is a top isometric view of the mid plate 704 over the bottom plate 706. The mid plate has feedthrus 714 as mentioned above and a series of general return ports 708 which collect coolant from the individual cooling chambers and feed it back to return lines. The mid plate 704 also has an arrangement of multiple lands that define the cooling chambers with respect to the top plate (not shown). The lands each include the orifice 724 through which coolant is allowed to enter the cooling chamber.

FIG. 14B is a top isometric view of the bottom plate 706. The bottom plate includes the feedthrus 714 and the return ports 708 which are also formed in the mid plate. This view also shows the screws 716 that hold the bottom plate to the top plate to hold the cooling plate together.

The bottom plate is also fitted with one or more supply ports 730. In the illustrated example there are six supply ports, however there may be fewer or many more, depending on the particular implementation. The supply ports provide coolant into the area between the top surface 728 of the bottom plate and the bottom surface of the mid plate. This area serves as the supply plenum 720 for the orifices 724 in the mid plate. Coolant provided into the supply ports will be contained in part by the top surface 728 of the bottom plate 706. Pressure from the supply ports will then drive the coolant into the orifices 724 of the mid plate.

FIG. 15A is a bottom isometric view of the bottom plate 706 of FIG. 14B. The bottom side of the bottom plate includes feedthrus 714 and return ports 708. The supply ports 730 allow coolant to be supplied through the bottom plate toward the opposite side of the bottom plate into the supply plenum. The supply ports have attachment points to allow a coolant supply and heat exchanger system to be coupled to the supply ports. The bottom plate also has holes 708 for the return ports to supply coolant back to the heat exchanger system after it has passed through the coolant chambers to cool the cooling plate and the chuck's top surface.

FIG. 15B is a bottom isometric view of the cooling plate 700 with the bottom plate removed so that the mid plate is exposed. From the bottom side, the orifices 724 are visible as are the feedthrus 714 and return ports 708. The bottom surface of the mid plate 704 forms an upper surface of the supply plenum 720 so that coolant supplied into the area below the bottom of the mid plate will be captured between the bottom surface of the mid plate and a top surface 728 of the bottom plate. The coolant may flow freely from the supply plenum into the orifices. The coolant that flows past the orifices will enter into the respective coolant chamber for orifice.

FIG. 15C is a bottom isometric view of the top plate 706. In addition to feedthrus 714 and threaded holes 738, an outline for each coolant chamber 718 is shown. The individual chambers are aligned over each respective orifice 724 so that coolant fluid that passes through each valve is delivered into a respective coolant chamber.

The cooling zones are shown as circular and uniformly sized. The shape, size, and positions of the cooling zones may be modified to suit any particular local cooling requirements. In addition, the height of the channel in the cooling zone (between the top and mid plate) may be modified to achieve a uniform, or a non-uniform, heat transfer across the zone.

FIG. 16 is a cross-sectional side view of the cooling plate with all three of the plates 702, 704, 706 installed together. Coolant in the supply plenum 720 between the bottom 706 and mid 704 plates flows through the orifice 724 into a cooling chamber 718 above the valve. The coolant will absorb heat from the top plate 702 in the cooling chamber and then move to the return plenum 734. The cooling chamber and the return plenum are defined within a space between the top 702 and mid 704 plates and defined by the shape and the configuration of the two plates with respect to each other. From the return plenum, the coolant flows through return ports to heat exchangers to be cooled and then returned back to the supply plenum 720 through supply ports.

FIG. 17 shows a similar cross-sectional view of the cooling plate as in FIG. 16 with the three plates attached together. While each orifice 724 can be modified by machining, the size of the orifice may also be modified using interchangeable parts. A plastic insert 726 may be placed between the supply plenum 712 and the orifice 724 or between the orifice and the coolant chamber 718 to restrict the flow rate through the orifice. The plastic insert may have an exterior adapted to stay in place in the middle plate and an interior sleeve with a diameter designed to restrict flow. Different inserts may be provided with different diameter sleeves to allow for different flow adjustments. The plastic insert allows the flow rate through each orifice to be adjusted individually.

FIG. 18 is a diagram of determining appropriate coolant flow orifice size adjustments for a cooling plate 700. In the illustrated example, a ceramic puck 702 is attached to a cooling plate 700. The ceramic plate is heated externally or using its own heaters. Heat exchangers (not shown) are attached to the supply and return ports of the ESC through an adapter plate 754. As the ESC is heated and cooled, the temperature of the ceramic plate is measured using, for example, an infrared camera 746 or a temperature monitor wafer.

The camera is coupled to a calibration system 748 that is controlled by a calibration system controller or processor 752 to measure temperature based on the camera image or to determine orifice adjustments. The calibration system 748 may be a computer or a dedicated system designed for this purpose. The infrared image from the camera is analyzed in an image analysis module 750 and compared to a reference or intended infrared image. Differences between the measured temperature at each point on the ceramic plate and the desired temperature for that point are then used by the controller to determine orifice adjustments for the various cooling zones across the ceramic plate. The cooling plate may be disassembled, the flow rates adjusted, and the cooling plate reassembled. The adjusted cooling plate may then be used directly for fabrication, it may also be retested. Any resulting temperature differences are observed by the IR camera or a temperature monitor wafer. Further adjustments may then be made until the desired coolant flow is obtained.

The flow to each cooling zone may be set during a one-time calibration process. This calibration process may be used to compensate for manufacturing non-uniformities. The cooling plate may also be removed from production and recalibrated to adjust for changes over time or for use in a different chamber or process. If the orifices have been machined to be larger, they cannot be machined to made smaller, however inserts or sleeves may be used to reduce coolant flow as desired for a particular cooling plate.

The calibration process may be described as shown in FIG. 19. First at 802, the assembled ESC is placed in a test fixture. The test fixture has the IR camera 746 and an adapter plate 754 which makes coolant 756 and electrical 758 connections to the ESC.

At 804, heat is applied to the ESC. This may be done in a process chamber or oven, or by activating or energizing heater traces within the ESC. At 806, the temperature of the top plate of the ESC measured. In the system of FIG. 18, the dielectric puck is imaged by an infrared camera, but the invention is not so limited.

At 808, a computer-based control algorithm may be used to analyze the temperatures of the ESC and at 810 to determine adjustments. At 812, the flow rate through each orifice may be adjusted serially or simultaneously by disassembling the cooling plate. The IR camera may then image the puck again to determine if any further adjustments should be made. This adjustment process may continue until the desired temperature profile (uniform or otherwise) is achieved.

The individual adjustment of each orifice may be used to achieve extremely uniform wafer temperature during a fabrication process. Changes in coolant flow may be used to compensate for variations in the thickness of the bond between the ceramic puck and the cooling plate and for variations in the printing of heater traces within the ceramic puck. In addition the ESC may be calibrated to a deliberately non-uniform temperature profile. This may be used to compensate for chamber level asymmetries.

It is to be understood that the above description is intended to be illustrative, and not restrictive. For example, while flow diagrams in the figures show a particular order of operations performed by certain embodiments of the invention, it should be understood that such order is not required (e.g., alternative embodiments may perform the operations in a different order, combine certain operations, overlap certain operations, etc.). Furthermore, many other embodiments will be apparent to those of skill in the art upon reading and understanding the above description. Although the present invention has been described with reference to specific exemplary embodiments, it will be recognized that the invention is not limited to the embodiments described, but can be practiced with modification and alteration within the spirit and scope of the appended claims. The scope of the invention should, therefore, be determined with reference to the appended claims, along with the full scope of equivalents to which such claims are entitled. 

What is claimed is:
 1. A substrate chuck comprising: a dielectric puck to electrostatically grip a substrate; a cooling plate of the chuck fastened to and thermally coupled to the dielectric puck; a supply plenum within the chuck to receive coolant from an external source; a plurality of coolant chambers within the chuck thermally coupled to the cooling plate, the coolant chambers to receive coolant from the supply plenum; a return plenum within the chuck coupled to the cooling chambers to exhaust coolant from the cooling chambers; and a plurality of adjustable orifices within the chuck between the supply plenum and a respective one of the cooling chambers to control a flow rate of coolant from the supply plenum to the cooling chambers.
 2. The apparatus of claim 1, further comprising a plurality of return ports to return coolant from the cooling chambers for resupply to the supply plenum.
 3. The apparatus of claim 1, wherein the adjustable orifices each comprise: an orifice between the supply plenum and a respective cooling chambers; and an interchangeable insert to control coolant flow through the orifice.
 4. The apparatus of claim 1, wherein the cooling plate comprises a middle plate and wherein the adjustable orifices are formed in the middle plate.
 5. The apparatus of claim 4, wherein the cooling plate further comprises a top plate and a bottom plate, wherein the middle plate is sandwiched between the top plate and the bottom plate, wherein the cooling plate is disassembled to access the middle plate.
 6. The apparatus of claim 5, wherein at least some of the adjustable orifices of the middle plate are machined when the cooling plate is disassembled to adjust a flow rate so that the flow rate of some of the adjustable orifices is different from others of the adjustable orifices.
 7. The apparatus of claim 5, further comprising a plurality of inserts to restrict flow through a respective orifice, the inserts being exchangeable to provide different flow rates.
 8. An apparatus comprising: a dielectric puck to electrostatically grip a silicon wafer; a top plate of a cooling plate, the top plate being fastened to the dielectric puck; a middle plate of a cooling plate the middle plate having a plurality of adjustable orifices and defining a plurality of coolant chambers between the middle plate and the top plate, the coolant chambers each being in communication with at least one orifice to allow coolant to flow through the middle plate to a respective coolant chamber; a bottom plate of a cooling plate, the bottom plate defining a supply plenum between the bottom plate and the middle plate to supply coolant to the orifices; and wherein a flow rate through each orifice is independently adjustable to control coolant flow through each respective one of the orifices.
 9. The apparatus of claim 8, wherein the orifices comprise openings in the middle plate, wherein the middle plate may be dissembled from the top plate and the bottom plate to machine the orifices to adjust the flow rate through each respective orifice, and wherein the middle plate may be assembled to the top plate and the bottom plate for use after the machining.
 10. The apparatus of claim 8, wherein the middle plate defines return plenums to conduct coolant from the coolant chambers to a return port.
 11. The apparatus of claim 10, wherein the middle plate has hexagonal areas to define the coolant chambers and coolant channels of the return plenums surrounding each hexagonal area.
 12. The apparatus of claim 11, the middle plate further comprising a circular channel surrounding the hexagonal areas and wherein the coolant channels conduct the coolant into the circular channel of the middle plate.
 13. The apparatus of claim 11, wherein each hexagonal area is supplied by a different one of the plurality of adjustable orifices.
 14. A method for adjusting coolant flow in an electrostatic chuck, the method comprising: heating a dielectric puck, the dielectric puck being for electrostatically gripping a silicon wafer; detecting heat at a plurality of locations on a top surface of the dielectric puck, the locations each being thermally coupled to at least one of a plurality of coolant chambers of the electrostatic chuck; and adjusting a plurality of orifices within the electrostatic chuck that are each coupled to a respective one of the coolant chambers to control coolant flow into the coolant chambers based on the detected heat.
 15. The method of claim 14, wherein detecting heat comprises imaging the dielectric puck during flowing coolant into the coolant chambers through the orifices and during applying heat to the dielectric puck.
 16. The method of claim 15, wherein applying heat comprises activating heaters within the electrostatic chuck.
 17. The method of claim 14 wherein adjusting a plurality of orifices comprises independently changing the flow rate through each of the plurality of orifices to control the flow of coolant from a supply plenum to a respective coolant chamber.
 18. The method of claim 14, wherein detecting heat comprises determining a temperature level at different areas of the dielectric puck, the different areas corresponding to different coolant chambers.
 19. The method of claim 18, wherein adjusting the orifices comprises increasing coolant flow to coolant chambers corresponding to hotter areas and decreasing coolant flow to coolant chambers corresponding to cooler areas.
 20. The method of claim 14, wherein adjusting orifices comprises disassembling the electrostatic chuck, machining at least a subset of the plurality of the orifices to change the respective flow rate, and reassembling the electrostatic chuck. 